Simulation analysis of boron pocket deactivation in NMOS transistors with SPER junctions

  1. Aboy, M.
  2. Marqués, L.A.
  3. López, P.
  4. Santos, I.
  5. Barbolla, J.
  6. Duffy, R.
  7. L. Pelaz
Proceedings:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Year of publication: 2005

Volume: 2005

Pages: 451-454

Type: Conference paper

DOI: 10.1109/SCED.2005.1504479 GOOGLE SCHOLAR