Strain evaluation in SiC MEMS test structures

  1. Bosi, M.
  2. Attolini, G.
  3. Watts, B.E.
  4. Frigeri, C.
  5. Rossi, F.
  6. Poggi, A.
  7. Roncaglia, A.
  8. Mancarella, F.
  9. Martínez, O.
  10. Hortelano, V.
Proceedings:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781566777452

Year of publication: 2009

Volume: 25

Issue: 8 PART 2

Pages: 1031-1037

Type: Conference paper

DOI: 10.1149/1.3207702 GOOGLE SCHOLAR